适用处
之前的方式
Vision
Inspection
M/C
Real Defect
+
Contamination
采用CO2清洗
适用处
CO2 Jet CleanerRemoving Contamination
Vision
Inspection
M/C
Real Defect
改善
In-Line Conveyor type
Conveyor Loading
XY Scanning type
Stand alone type
Magazine/Cassette
/Tray Stack
Auto Loading
XY Scanning type
Wafer Cleaner( ~12”)
Cassette Auto Loading
Ring Frame Loading
Dual Cleaning Chambers
Spinning type
Stand alone type Manual Loading
Multi Size Cleaning
XY Scanning type