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CO2 세정기

C3100 - CO2 Automatic Cleaner

  • Automatic Ring-Frame loading, Stand alone cleaner
C1100
M/C Type Cassette loading
Automatic cleaning
Dual cleaning chambers
Cleaning Target Glass/ISM/TSV Wafers(~12”) with ring frame
CO2 Jet Cleaner  SM201 / S201 / SS201 (selectable)  
Cleaning Mode Spinning
Cleaning Area Max. 300mm in diameter
Dimension 2000L x 1700W x 1900H mm 
Utilities 220VAC, 50/60Hz, 1 Phase, 20A 
CDA : 5~8kg/cm² 
Options Suction Unit / ULPA filter